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Plasma Emission Measurement: schematic gauge setup


The plasma emission is observed inside the chamber by use of a special flexible vacuum fiber optics cable, which is connected thru a flange with another regular fiber light guide outside the chamber towards our TranSpec Spectrometer.

Note that, due to the use of these flexible vacuum fiber optics, the plasma emission can be observed at different positions inside the chamber!

Plasma Emissions Measurement Schematic Gauge Setup



The picture right beside shows a vacuum fiber feed-thru with a KF-50 flange and two FSMA adapters in order to connect a vacuum fiber inside and a regular fiber outside the chamber towards the TranSpec spectrometer.

Vacuum Feed-Thru with connected Fibers